CPC G01N 23/046 (2013.01) [G01N 23/083 (2013.01); G01N 2223/204 (2013.01); G01N 2223/309 (2013.01)] | 39 Claims |
1. A system comprising:
at least one position-sensitive x-ray detector;
an x-ray source comprising an x-ray transmissive vacuum window having an outer surface configured to be less than 70 millimeters from the region of interest of the object, the x-ray source configured to produce diverging x-rays, at least some of the diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending from the x-ray source, through a region of interest of an object, to the at least one position-sensitive x-ray detector, the diverging x-rays received by the at least one position-sensitive x-ray detector having propagation paths within an angular divergence angle greater than 1 degree centered on the x-ray propagation axis, the x-ray propagation axis at a first angle with respect to the outer surface of the vacuum window, the first angle in a range of 3 degrees to 45 degrees;
at least one sample motion stage configured to rotate the object about a rotation axis and configured such that the rotation axis has a second angle relative to the x-ray propagation axis;
a sample mount on the at least one sample motion stage, the sample mount configured to hold the object, the sample mount comprising a first portion in the propagation paths of at least some of the diverging x-rays propagating through the object to the at least one position-sensitive x-ray detector, the first portion having an x-ray transmission greater than 30% for x-rays having energies greater than 50% of a maximum x-ray energy of an x-ray spectrum of the diverging x-rays; and
at least one motion mechanism configured to move the at least one position-sensitive detector relative to the object to vary a geometric magnification of an image of a region of interest of the object generated by the at least one position-sensitive x-ray detector.
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