US 12,153,001 B2
High throughput 3D x-ray imaging system using a transmission x-ray source
David Vine, Berkeley, CA (US); Wenbing Yun, Walnut Creek, CA (US); Janos Kirz, Berkeley, CA (US); Sheraz Gul, San Ramon, CA (US); Sylvia Jia Yun Lewis, San Francisco, CA (US); and Richard Ian Spink, Pleasant Hill, CA (US)
Assigned to Sigray, Inc., Concord, CA (US)
Filed by Sigray, Inc., Concord, CA (US)
Filed on May 3, 2023, as Appl. No. 18/311,558.
Application 18/311,558 is a continuation of application No. 17/540,608, filed on Dec. 2, 2021, granted, now 11,686,692.
Claims priority of provisional application 63/274,367, filed on Nov. 1, 2021.
Claims priority of provisional application 63/122,354, filed on Dec. 7, 2020.
Prior Publication US 2023/0384245 A1, Nov. 30, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G01N 23/046 (2018.01); G01N 23/083 (2018.01)
CPC G01N 23/046 (2013.01) [G01N 23/083 (2013.01); G01N 2223/204 (2013.01); G01N 2223/309 (2013.01)] 39 Claims
OG exemplary drawing
 
1. A system comprising:
at least one position-sensitive x-ray detector;
an x-ray source comprising an x-ray transmissive vacuum window having an outer surface configured to be less than 70 millimeters from the region of interest of the object, the x-ray source configured to produce diverging x-rays, at least some of the diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending from the x-ray source, through a region of interest of an object, to the at least one position-sensitive x-ray detector, the diverging x-rays received by the at least one position-sensitive x-ray detector having propagation paths within an angular divergence angle greater than 1 degree centered on the x-ray propagation axis, the x-ray propagation axis at a first angle with respect to the outer surface of the vacuum window, the first angle in a range of 3 degrees to 45 degrees;
at least one sample motion stage configured to rotate the object about a rotation axis and configured such that the rotation axis has a second angle relative to the x-ray propagation axis;
a sample mount on the at least one sample motion stage, the sample mount configured to hold the object, the sample mount comprising a first portion in the propagation paths of at least some of the diverging x-rays propagating through the object to the at least one position-sensitive x-ray detector, the first portion having an x-ray transmission greater than 30% for x-rays having energies greater than 50% of a maximum x-ray energy of an x-ray spectrum of the diverging x-rays; and
at least one motion mechanism configured to move the at least one position-sensitive detector relative to the object to vary a geometric magnification of an image of a region of interest of the object generated by the at least one position-sensitive x-ray detector.