| CPC C23C 14/54 (2013.01) [C23C 14/246 (2013.01)] | 11 Claims |
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1. A powder conveying apparatus for conveying powder from a powder feedstock source to a vaporizer, the powder conveying apparatus comprising:
a powder transport line configured to connect the powder feedstock source to the vaporizer and configured to supply the powder from the powder feedstock source to the vaporizer;
a first purge-gas supply line via which a buffer tank is coupled to the powder transport line at a first branch point, the first purge-gas supply line enabling a purge gas to be supplied from the buffer tank to the powder transport line;
a first valve provided on a powder feedstock source-side of the powder transport line with respect to the first branch point;
a second valve provided on a vaporizer-side of the powder transport line with respect to the first branch point;
a first purge gas valve provided on the first purge-gas supply line; and
a controller configured to
a) control opening and closing of the first valve, the second valve, and the first purge gas valve,
b) supply the powder from the powder feedstock source to the vaporizer through the powder transport line and via the first valve and the second valve,
c) after b), close the first valve and open the second valve such that the purge gas from the buffer tank is delivered to the vaporizer via the second valve, and the second valve is purged as a result of delivering the purge gas to the vaporizer, and
d) repeat b) and c) a set number of times.
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