US 12,484,448 B2
Deformation detection sensor
Shingo Harada, Nagaokakyo (JP); Hidekazu Kano, Nagaokakyo (JP); Mei Watanabe, Nagaokakyo (JP); and Hiroaki Kitada, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Jul. 13, 2022, as Appl. No. 17/864,019.
Application 17/864,019 is a continuation of application No. PCT/JP2021/028283, filed on Jul. 30, 2021.
Claims priority of application No. 2020-129282 (JP), filed on Jul. 30, 2020.
Prior Publication US 2022/0344572 A1, Oct. 27, 2022
Int. Cl. H01L 41/113 (2006.01); H10N 30/03 (2023.01); H10N 30/072 (2023.01); H10N 30/30 (2023.01); H10N 30/50 (2023.01); H10N 30/87 (2023.01)
CPC H10N 30/302 (2023.02) [H10N 30/03 (2023.02); H10N 30/072 (2023.02); H10N 30/50 (2023.02); H10N 30/872 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A deformation detection sensor comprising:
a substrate;
a detection electrode disposed on the substrate;
a first ground electrode;
a second ground electrode disposed on the substrate;
a piezoelectric film disposed between the detection electrode and the first ground electrode;
a wiring connected to the detection electrode; and
a joint member that joins the wiring to the detection electrode,
wherein the piezoelectric film is disposed on a first surface of the substrate that is opposite to a second surface of the substrate on which the joint member is disposed.