US 12,483,003 B2
HCG tunable VCSEL with integrated detector in the sacrificial layer
Dalila Ellafi, Berkeley, CA (US); Neelanjan Bandyopadhyay, Berkeley, CA (US); Christopher Chase, Berkeley, CA (US); Michael Y. Huang, Berkeley, CA (US); Carlos F. R. Mateus, Berkeley, CA (US); Chuanshun Cao, Berkeley, CA (US); Carl V. Ford, Berkeley, CA (US); Kai Hui, Berkeley, CA (US); and Philip Worland, Berkeley, CA (US)
Assigned to Bandwidth10, LTD., Berkeley, CA (US)
Filed by Bandwidth10, LTD., Berkeley, CA (US)
Filed on Dec. 12, 2023, as Appl. No. 18/536,772.
Application 18/536,772 is a continuation in part of application No. 18/107,140, filed on Feb. 8, 2023, granted, now 12,224,559.
Application 18/536,772 is a continuation in part of application No. 18/111,902, filed on Feb. 21, 2023.
Application 18/536,772 is a continuation in part of application No. 18/207,804, filed on Jun. 9, 2023, granted, now 12,301,291.
Application 18/536,772 is a continuation in part of application No. 18/207,810, filed on Jun. 9, 2023, granted, now 12,294,199.
Application 18/536,772 is a continuation in part of application No. 18/207,818, filed on Jun. 9, 2023, granted, now 12,316,075.
Application 18/536,772 is a continuation in part of application No. 18/207,826, filed on Jun. 9, 2023, granted, now 12,300,970.
Application 18/536,772 is a continuation in part of application No. 18/207,864, filed on Jun. 9, 2023.
Application 18/536,772 is a continuation in part of application No. 18/207,838, filed on Jun. 9, 2023, granted, now 12,278,462.
Application 18/536,772 is a continuation in part of application No. 18/207,857, filed on Jun. 9, 2023, granted, now 12,298,436.
Application 18/536,772 is a continuation in part of application No. 18/214,986, filed on Jun. 27, 2023.
Application 18/536,772 is a continuation in part of application No. 18/241,200, filed on Aug. 31, 2023.
Application 18/536,772 is a continuation in part of application No. 18/223,535, filed on Jul. 18, 2023.
Application 18/536,772 is a continuation in part of application No. 18/224,867, filed on Jul. 21, 2023.
Application 18/536,772 is a continuation in part of application No. 18/224,926, filed on Jul. 21, 2023.
Application 18/536,772 is a continuation in part of application No. 18/225,029, filed on Jul. 21, 2023.
Application 18/536,772 is a continuation in part of application No. 18/215,200, filed on Jun. 28, 2023.
Application 18/536,772 is a continuation in part of application No. 18/536,345, filed on Dec. 12, 2023.
Application 18/536,772 is a continuation in part of application No. 18/536,323, filed on Dec. 12, 2023.
Claims priority of provisional application 63/432,050, filed on Dec. 12, 2022.
Prior Publication US 2025/0158357 A1, May 15, 2025
This patent is subject to a terminal disclaimer.
Int. Cl. H01S 5/026 (2006.01); A61B 5/00 (2006.01); A61B 5/145 (2006.01); A61B 5/1455 (2006.01); H01S 5/183 (2006.01); H01S 5/34 (2006.01)
CPC H01S 5/0264 (2013.01) [A61B 5/14532 (2013.01); A61B 5/1455 (2013.01); A61B 5/486 (2013.01); A61B 5/681 (2013.01); H01S 5/18361 (2013.01); H01S 5/3416 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A VCSEL system, comprising:
a tunable VCSEL laser including:
a first mirror;
one or more active regions with a first active region adjacent to the first mirror, each of an active region including quantum wells and barriers, each of an active region surrounded by one or more p-n junctions, the one or more active regions including a selected shape structure each with a tunnel junction (TJ);
one or more apertures provided with the selected shape structure;
one or more buried tunnel junctions (BTJ), additional TJ's, planar structures and additional BTJ's are created during a regrowth process that is independent of a first growth process of the first mirror, the active region and the one or more TJs;
one or more electrical confinement apertures defined by the one or more BTJ's, additional TJ's, planar structures and additional BTJ;
a vertical resonator cavity disposed over the electrical confinement aperture;
a high contrast grating (HCG) operating as a second mirror positioned over the vertical resonator cavity, the HCG configured to reflect a first portion of light back into the vertical resonator cavity, and a second portion of the light as an output beam from the tunable VCSEL laser, the HCG structure being layered on the selected shape structure;
wherein a shape of the output beam of the tunable VCSEL laser is determined by a geometric shape of the one or more BTJ apertures, apertures for additional TJ's, planar structures and additional BTJ's, with a transmission function of the HCG and is designed according to the desired optical transmission function of the application; and
a DBR on one side of the junctions, and an HCG grading on the other side of the junctions; and
a sacrificial layer with the tunable VCSEL laser that in combination are configured to provide a measurement of a user's glucose without physically penetrating a user's skin.