US 12,482,766 B2
MIMcap corner structures in the keep-out zones of a semiconductor die and methods of forming the same
Yen-Kun Lai, New Taipei (TW); Chien Hao Hsu, Zhubei (TW); Wei-Hsiang Tu, Hsinchu (TW); Kuo-Chin Chang, Chiayi (TW); and Mirng-Ji Lii, Sinpu Township (TW)
Assigned to Taiwan Semiconductor Manufacturing Company Limited, Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company Limited, Hsinchu (TW)
Filed on Mar. 31, 2022, as Appl. No. 17/709,808.
Prior Publication US 2023/0317641 A1, Oct. 5, 2023
Int. Cl. H01L 23/64 (2006.01); H01L 23/00 (2006.01); H01L 23/498 (2006.01); H01L 25/065 (2023.01); H01L 25/10 (2006.01); H10D 1/68 (2025.01); H10D 84/01 (2025.01)
CPC H01L 23/642 (2013.01) [H01L 24/16 (2013.01); H01L 24/32 (2013.01); H01L 24/73 (2013.01); H01L 25/105 (2013.01); H10D 1/692 (2025.01); H10D 84/01 (2025.01); H01L 23/49816 (2013.01); H01L 23/49822 (2013.01); H01L 23/49833 (2013.01); H01L 23/49838 (2013.01); H01L 25/0657 (2013.01); H01L 2224/16227 (2013.01); H01L 2224/16238 (2013.01); H01L 2224/32227 (2013.01); H01L 2224/32238 (2013.01); H01L 2224/73204 (2013.01); H01L 2225/06513 (2013.01); H01L 2225/06524 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A semiconductor die comprising:
semiconductor devices located on a semiconductor substrate; and
metal-insulator-metal corner structures overlying the semiconductor devices and located in corner regions of the semiconductor die, wherein;
each of the metal-insulator-metal corner structures comprises a bottom corner plate, a dielectric corner plate overlying the bottom corner plate, and a top corner plate overlying the dielectric corner plate; and
each of the metal-insulator-metal corner structures has a horizontal cross-sectional shape selected from a triangular shape and a non-triangular polygonal shape, wherein the non-triangular polygonal shape includes a connecting shape and two laterally-extending strips, and the two laterally-extending strips extend along two horizontal directions that are perpendicular to each other and the two laterally-extending strips are connected to each other by the connecting shape.