US 12,482,678 B2
Apparatus with deformable heater and method for heating a substrate thereof
Jürgen Burggraf, Schärding (AT)
Assigned to EV GROUP E. THALLNER GMBH, St. Florian Am Inn (AT)
Appl. No. 17/778,476
Filed by EV Group E. Thallner GmbH, St. Florian am Inn (AT)
PCT Filed Dec. 2, 2019, PCT No. PCT/EP2019/083342
§ 371(c)(1), (2) Date May 20, 2022,
PCT Pub. No. WO2021/110238, PCT Pub. Date Jun. 10, 2021.
Prior Publication US 2022/0415675 A1, Dec. 29, 2022
Int. Cl. H01L 21/67 (2006.01); H01L 21/324 (2006.01)
CPC H01L 21/67103 (2013.01) [H01L 21/324 (2013.01); H01L 21/67092 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus for heating a substrate, said apparatus comprising:
i) a heater;
ii) a substrate holder having a substrate holder surface, wherein the substrate to be heated can be placed on the substrate holder surface;
iii means for exerting forces on the heater; and
iv) a control unit for controlling the means for exerting forces, wherein the heater is deformable by the means for exerting forces,
wherein, due to deformation of the heater effected by the means for exerting forces, the deformation of the heater caused by external forces can be offset.