US 12,482,632 B2
High-frequency power supply apparatus
Yuichi Hasegawa, Osaka (JP); and Yuya Ueno, Osaka (JP)
Assigned to DAIHEN Corporation, Osaka (JP)
Filed by DAIHEN Corporation, Osaka (JP)
Filed on Dec. 26, 2023, as Appl. No. 18/396,280.
Claims priority of application No. 2022-211567 (JP), filed on Dec. 28, 2022.
Prior Publication US 2024/0222077 A1, Jul. 4, 2024
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32155 (2013.01) [H01J 37/32183 (2013.01); H01J 2237/327 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A high-frequency power supply apparatus comprising:
a first power supply configured to i) generate a high-frequency voltage having a first fundamental frequency, ii) perform frequency modulation on the high-frequency voltage using a trapezoid modulation signal, and output a modulated high-frequency voltage toward a load;
a second power supply configured to generate and output, toward the load, a negative polarity voltage having a second fundamental frequency being lower than the first fundamental frequency;
a matching circuit connected between the first power supply and the load, the matching circuit being configured to match an impedance on a side of the first power supply and an impedance on a side of the load; and
a low-pass filter connected between the second power supply and the load,
wherein the trapezoidal modulation signal has a frequency equal to the second fundamental frequency.