US 12,482,086 B2
Defect inspection apparatus
Naoto Mishina, Kyoto (JP); Hirofumi Okamoto, Kyoto (JP); Takashi Tanaka, Kyoto (JP); Satoru Sugimoto, Kyoto (JP); Masashi Hayakawa, Kyoto (JP); Takahide Hatahori, Kyoto (JP); and Hiroshi Horikawa, Kyoto (JP)
Assigned to SHIMADZU CORPORATION, Kyoto (JP)
Appl. No. 18/026,716
Filed by SHIMADZU CORPORATION, Kyoto (JP)
PCT Filed Sep. 15, 2021, PCT No. PCT/JP2021/033951
§ 371(c)(1), (2) Date Mar. 16, 2023,
PCT Pub. No. WO2022/059710, PCT Pub. Date Mar. 24, 2022.
Claims priority of application No. 2020-157140 (JP), filed on Sep. 18, 2020.
Prior Publication US 2023/0401688 A1, Dec. 14, 2023
Int. Cl. G06T 7/00 (2017.01); G01N 21/01 (2006.01); G01N 21/45 (2006.01)
CPC G06T 7/0004 (2013.01) [G01N 21/01 (2013.01); G01N 21/45 (2013.01); G01N 2201/06113 (2013.01); G06T 2207/30204 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A defect inspection apparatus comprising:
an imager configured to image an inspection target;
a display configured to display an image based on reflected light from the inspection target captured by the imager; and
a controller configured or programmed to receive a setting of a marking in a predetermined region of interest on the image displayed on the display;
wherein the controller is configured or programmed to superimpose an image of the marking on at least one of a position corresponding to the predetermined region of interest in a moving image based on reflected light captured by the imager, or a position corresponding to the predetermined region of interest in an image of the inspection result of the inspection target's defects obtained using the moving image;
wherein the setting of marking in the predetermined region of interest is received on a still image based on the reflect light captured by the imager displayed on the display.