| CPC G03F 7/70925 (2013.01) [G03F 7/70525 (2013.01); G03F 7/70825 (2013.01); G03F 7/70991 (2013.01)] | 6 Claims |
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1. A substrate processing apparatus, comprising:
a substrate cleaning apparatus, comprising:
a first frame, provided with two fixtures, four power mechanisms and two first linkages, wherein the two fixtures are arranged at two opposite sides of the first frame, each of the power mechanisms comprises a housing, a rack, a gear, an elastic element and a drive element, the rack is mutually meshed with the gear to be disposed in the housing, each of the power mechanisms is connected to a corresponding end of each of the two fixtures via one side of the gear, the elastic element abuts between the rack and the housing, the drive element is disposed on another side of the gear or the rack, and the drive element is exposed outside the housing, the first linkages are arranged at two opposite sides of the first frame, each of the first linkages has two ends, wherein each end of each of the first linkages is provided with one of the four power mechanisms, each of the first linkages is located between the two fixtures;
a first frame placement area, configured to place the first frame, wherein the first frame placement area is provided with a placement mechanism, a fixture opening device and multiple fixing arms, the first frame is horizontally placed on multiple transmission rollers by the placement mechanism, the first frame is used for placing a substrate and is fixed by the multiple fixing arms;
a substrate cleaning and drying area, communicated to one side of the first frame placement area, wherein the first frame having fixed the substrate is moved through the multiple transmission rollers from the first frame placement area to the substrate cleaning and drying area to clean and dry the substrate;
a first frame clamping area, communicated to one side of the substrate cleaning and drying area, wherein the first frame is moved through the multiple transmission rollers from the substrate cleaning and drying area to the first frame clamping area after the substrate has been cleaned and dried, then the substrate is taken out by the two fixtures, a clamping mechanism is provided in the first frame clamping area to clamp the first frame from a horizontal position to an upright position, and
a first frame return area, communicated to the first frame clamping area and located at one side of the first frame placement area, the substrate cleaning and drying area and the first frame clamping area, wherein the first frame return area includes multiple upper return rollers and multiple lower return rollers, after the substrate is taken out from the first frame, the first frame is moved through the multiple upper return rollers and the multiple lower return rollers from the first frame clamping area through the first frame return area and is returned to the first frame placement area.
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