US 12,481,196 B2
Optical phase shifter with one or more integrated thermoelectric devices
Vibhor Jain, Essex Junction, VT (US); Yusheng Bian, Ballston Lake, NY (US); Shesh Mani Pandey, Saratoga Springs, NY (US); Abdelsalam Aboketaf, Essex Junction, VT (US); and Ravi Prakash Srivastava, Clifton Park, NY (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GlobalFoundries U.S. Inc., Malta, NY (US)
Filed on Jan. 9, 2023, as Appl. No. 18/094,716.
Prior Publication US 2024/0231173 A1, Jul. 11, 2024
Int. Cl. G02F 1/21 (2006.01); F25B 21/04 (2006.01); G02F 1/01 (2006.01); G02F 1/025 (2006.01); G02F 1/225 (2006.01); H10N 10/17 (2023.01); H10N 10/851 (2023.01); H10N 10/852 (2023.01); G02B 6/125 (2006.01); G02F 1/015 (2006.01)
CPC G02F 1/212 (2021.01) [F25B 21/04 (2013.01); G02F 1/0147 (2013.01); G02F 1/025 (2013.01); G02F 1/225 (2013.01); G02F 1/2257 (2013.01); H10N 10/17 (2023.02); H10N 10/852 (2023.02); H10N 10/8556 (2023.02); G02B 6/125 (2013.01); G02F 1/0151 (2021.01); G02F 2202/10 (2013.01); G02F 2203/50 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A structure comprising:
an optical phase shifter including a waveguide core having a first arm and a second arm laterally spaced from the first arm, the first arm having a first side and a second side opposite from the first side, and the second arm having a third side adjacent to the first side of the first arm and a fourth side opposite from the third side;
a first thermoelectric device including a first plurality of pillars and a second plurality of pillars that alternate with the first plurality of pillars in a first series circuit, the first plurality of pillars and the second plurality of pillars disposed in the first series circuit on the first side and the second side of the first arm of the waveguide core; and
a second thermoelectric device including a third plurality of pillars and a fourth plurality of pillars that alternate with the third plurality of pillars in a second series circuit, the third plurality of pillars and the fourth plurality of pillars of the second thermoelectric device disposed in the second series circuit on the third side and the fourth side of the second arm of the waveguide core,
wherein the first plurality of pillars and the third plurality of pillars comprise an n-type semiconductor material, and the second plurality of pillars and the fourth plurality of pillars comprising a p-type semiconductor material.