US 12,481,151 B2
Two-axis scanning mirror using piezoelectric drivers
Youmin Wang, Berkeley, CA (US); Yufeng Wang, Mountain View, CA (US); Kong Yin Ho, Mountain View, CA (US); and Gary Li, Mountain View, CA (US)
Assigned to BEIJING VOYAGER TECHNOLOGY CO., LTD., Beijing (CN)
Filed by BEIJING VOYAGER TECHNOLOGY CO., LTD., Beijing (CN)
Filed on Dec. 27, 2021, as Appl. No. 17/562,799.
Prior Publication US 2023/0204943 A1, Jun. 29, 2023
Int. Cl. G02B 26/08 (2006.01); G01S 7/481 (2006.01); G01S 7/484 (2006.01); G02B 26/10 (2006.01)
CPC G02B 26/0858 (2013.01) [G01S 7/4814 (2013.01); G01S 7/484 (2013.01); G02B 26/101 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A scanner for steering optical beams, comprising:
a micro-electromechanical system (MEMS) scanning mirror independently rotatable around a first axis and a second axis orthogonal to the first axis;
a piezoelectric actuator coupled to the MEMS scanning mirror, comprising:
a first pair of piezoelectric electrodes configured to drive the MEMS scanning mirror to rotate around the first axis; and
a second pair of piezoelectric electrodes configured to drive the MEMS scanning mirror to simultaneously rotate around the second axis;
a stage at a geometric center of the piezoelectric actuator connecting the first pair of piezoelectric electrodes and the second pair of piezoelectric electrodes;
at least one first torsion spring positioned along the second axis, configured to join the first pair of piezoelectric electrodes to the stage; and
at least one second torsion spring positioned along the first axis, configured to join the second pair of piezoelectric electrodes to the stage,
wherein the at least one first torsion spring and the at least one second torsion spring have different torsion spring designs.