US 12,481,142 B2
Photoelectron emission microscope
Takeshi Morimoto, Tokyo (JP); Momoyo Enyama, Tokyo (JP); and Akira Ikegami, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
Filed on Jan. 17, 2023, as Appl. No. 18/097,554.
Claims priority of application No. 2022-045583 (JP), filed on Mar. 22, 2022.
Prior Publication US 2023/0305281 A1, Sep. 28, 2023
Int. Cl. G02B 21/00 (2006.01); G02B 21/36 (2006.01)
CPC G02B 21/0076 (2013.01) [G02B 21/0072 (2013.01); G02B 21/361 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A photoelectron emission microscope comprising:
a sample stage on which a sample is to be placed;
an excitation light source configured to irradiate the sample with excitation light;
a camera configured to detect photoelectrons emitted from the sample and capture a photoelectron image;
an objective lens configured to focus the photoelectrons on a detection surface of the camera; and
a control unit configured to control each unit, wherein
the control unit aligns, based on a luminance distribution of a first photoelectron image, a field-of-view center of the camera with an irradiation position of the excitation light, and aligns, based on a second photoelectron image and a third photoelectron image that are captured by changing a lens intensity of the objective lens, the field-of-view center with a central axis of the objective lens.