US 12,481,141 B2
Compact laser scanning microscope system
Hongzhou Ma, Centreville, VA (US); and Jeffery S. Brooker, Manassas, VA (US)
Assigned to Thorlabs, Inc., Newton, NJ (US)
Filed by Thorlabs, Inc., Newton, NJ (US)
Filed on Mar. 16, 2022, as Appl. No. 17/696,513.
Claims priority of provisional application 63/163,419, filed on Mar. 19, 2021.
Prior Publication US 2022/0299742 A1, Sep. 22, 2022
Int. Cl. G02B 26/08 (2006.01); G02B 5/30 (2006.01); G02B 21/00 (2006.01); G02B 26/10 (2006.01)
CPC G02B 21/0048 (2013.01) [G02B 5/3016 (2013.01); G02B 26/0833 (2013.01); G02B 26/101 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A laser scanning imaging system comprising:
a first beam scanner;
a first set of relay lenses;
a second beam scanner;
a second set of relay lenses; and
an objective lens;
wherein the first beam scanner is configured to receive an input laser beam and scan the laser beam about one or more axes;
wherein the first set of relay lenses is configured to expand the laser beam scanned by the first beam scanner and conjugate a scanning plane of the first beam scanner with a scanning plane of the second beam scanner;
wherein the second beam scanner is configured to scan the laser beam relayed by the first set of relay lenses about one or more axes;
wherein the second set of relay lenses is configured to expand the laser beam scanned by the second beam scanner and project the scanning plane of the second beam scanner to a pupil of the objective lens; and
wherein the first beam scanner is a resonant micro-electromechanical system MEMS) device that scans in a single axis;
the second beam scanner is a non-resonant MEMS device that scans in two axes, one of which is parallel to the scan axis of the first beam scanner.