US 12,480,969 B2
Physical quantity sensor and inertial measurement unit
Satoru Tanaka, Chino (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Jun. 28, 2023, as Appl. No. 18/343,075.
Claims priority of application No. 2022-104368 (JP), filed on Jun. 29, 2022.
Prior Publication US 2024/0003936 A1, Jan. 4, 2024
Int. Cl. G01P 15/135 (2006.01); G01P 15/125 (2006.01)
CPC G01P 15/135 (2013.01) [G01P 15/125 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A physical quantity sensor that, when three directions orthogonal to one another are defined as a first direction, a second direction, and a third direction, detects a physical quantity in the third direction, the physical quantity sensor comprising:
a fixed portion fixed to a substrate;
a support beam having one end coupled to the fixed portion and provided along the second direction;
a movable body coupled to the other end of the support beam;
a first fixed electrode group provided at the substrate and arranged in the first direction of the support beam; and
a second fixed electrode group provided at the substrate and arranged in the first direction of the support beam,
wherein the movable body includes:
a first coupling portion coupled to the other end of the support beam and extending from the support beam in the first direction;
a first base portion coupled to the first coupling portion and provided along the second direction;
a first movable electrode group provided at the first base portion and facing the first fixed electrode group in the second direction;
a second coupling portion coupled to the other end of the support beam and extending from the support beam in the first direction;
a second base portion coupled to the second coupling portion and provided along the second direction; and
a second movable electrode group provided at the second base portion and facing the second fixed electrode group in the second direction,
wherein hm=hr, where hm is a height of a gravity center position of the movable body in the third direction hr is a height of a rotation center of the support beam in the third direction, and
hm1>hr>hm2, where hm1 is a height of a gravity center position of the first movable electrode group in the third direction and hm2 is a height of a gravity center position of the second movable electrode group in the third direction.