US 12,480,910 B2
Multi-gas detection with CS-FET arrays for food quality assessment
Zhen Yuan, San Francisco, CA (US); Mallika Bariya, San Jose, CA (US); Hossain Mohammad Fahad, Berkeley, CA (US); Rui Han, San Jose, CA (US); Niharika Gupta, Berkeley, CA (US); and Ali Javey, Lafayette, CA (US)
Assigned to The Regents of the University of California, Oakland, CA (US)
Appl. No. 17/758,221
Filed by The Regents of the University of California, Oakland, CA (US)
PCT Filed Dec. 30, 2020, PCT No. PCT/US2020/067586
§ 371(c)(1), (2) Date Jun. 29, 2022,
PCT Pub. No. WO2021/138505, PCT Pub. Date Jul. 8, 2021.
Claims priority of provisional application 62/955,097, filed on Dec. 30, 2019.
Prior Publication US 2023/0022231 A1, Jan. 26, 2023
Int. Cl. G01N 27/414 (2006.01); G01N 33/00 (2006.01); G01N 33/02 (2006.01)
CPC G01N 27/4141 (2013.01) [G01N 33/0031 (2013.01); G01N 33/02 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A multi-gas sensor, comprising:
a silicon substrate; and
a plurality of chemical sensitive field effect transistor (CSFET) sensors formed on a surface of the silicon substrate, wherein each one of the plurality of CSFET sensors is decorated with a different material to detect a different gas associated with food spoilage, wherein a first CSFET sensor of the plurality of CSFET sensors is decorated with ruthenium (Ru) to detect ammonia (NH3).