US 12,480,902 B2
Drift-free humidity sensor and calibration method thereof
Guangjun Yu, Shanghai (CN)
Assigned to SENSYLINK MICROELECTRONICS INC., Shanghai (CN)
Appl. No. 18/284,556
Filed by SENSYLINK MICROELECTRONICS INC., Shanghai (CN)
PCT Filed Oct. 24, 2022, PCT No. PCT/CN2022/126889
§ 371(c)(1), (2) Date Sep. 28, 2023,
PCT Pub. No. WO2023/165144, PCT Pub. Date Sep. 7, 2023.
Claims priority of application No. 202210196787.8 (CN), filed on Mar. 1, 2022; and application No. 202210197835.5 (CN), filed on Mar. 1, 2022.
Prior Publication US 2024/0175833 A1, May 30, 2024
Int. Cl. G01N 27/04 (2006.01); G01N 27/22 (2006.01)
CPC G01N 27/048 (2013.01) [G01N 27/045 (2013.01); G01N 27/223 (2013.01); G01N 27/226 (2013.01); G01N 27/228 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A drift-free humidity sensor, comprising a first humidity sensor unit, a second humidity sensor unit, and an analysis and processing unit, wherein the analysis and processing unit is a processor or is part of a processor; the first humidity sensor unit comprises a first measuring electrode and a first humidity sensitive material covering the first measuring electrode; the second humidity sensor unit comprises a second measuring electrode and a second humidity sensitive material covering the second measuring electrode; the first humidity sensor unit and the second humidity sensor unit have different maximum humidity drifts; and the analysis and processing unit is configured to calibrate and output measurement values of the first humidity sensor unit and the second humidity sensor unit.