US 12,480,890 B2
Deep learning based mode selection for inspection
Rajkumar Theagarajan, Milpitas, CA (US); Yujie Dong, Newark, CA (US); Jing Zhang, Santa Clara, CA (US); Brian Duffy, San Jose, CA (US); Atiqur Rahman Chowdhury, Milpitas, CA (US); Kris Bhaskar, San Jose, CA (US); Yang Li, San Jose, CA (US); and Graham Jensen, Milpitas, CA (US)
Assigned to KLA CORPORATION, Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Apr. 25, 2024, as Appl. No. 18/646,704.
Claims priority of provisional application 63/513,840, filed on Jul. 14, 2023.
Prior Publication US 2025/0020598 A1, Jan. 16, 2025
Int. Cl. G01N 21/95 (2006.01); G06T 7/00 (2017.01)
CPC G01N 21/9501 (2013.01) [G06T 7/0004 (2013.01); G01N 2201/1296 (2013.01); G06T 2207/30148 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system configured for determining information for a specimen, comprising:
a computer subsystem; and
one or more components executed by the computer subsystem, wherein the one or more components comprise a setup deep learning model configured for:
separately performing defect detection for a specimen based on output generated for the specimen by each of two or more modes of an inspection system, respectively; and
separately re-performing defect detection for the specimen based on masked output generated for said each of the two or more modes, respectively; and
wherein the computer subsystem is configured for:
separately generating the masked output for said each of the two or more modes, respectively, by determining a single output value from the output generated for at least a portion of the specimen and replacing all of the output generated for the at least the portion of the specimen with the single output value;
determining a difference between results of said separately performing defect detection and said separately re-performing defect detection for said each of the two or more modes, respectively; and
identifying a subset of the two or more modes for which the determined difference is larger than others of the two or more modes as one or more candidate modes for inspection of the specimen.