| CPC G01N 21/65 (2013.01) [G01N 2201/06113 (2013.01)] | 11 Claims |

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1. A Raman spectroscopy analysis method comprising:
irradiating a sample to be analyzed with laser light emitted from a laser light source using an objective optical element;
obtaining Raman scattering light from the sample to be analyzed;
dispersing the obtained Raman scattering light to determine total scattering intensity in a specific wavenumber range;
repeating a process of determining the total scattering intensity in the specific wavenumber range from irradiation of the laser light multiple times;
determining a ratio of the total scattering intensity in the specific wavenumber range for each time irradiation to the total scattering intensity in the specific wavenumber range for first time irradiation;
determining a correlation coefficient between the total scattering intensity in the specific wavenumber range for the first time irradiation and the total scattering intensity in the specific wavenumber range for each number of irradiation times;
identifying an upper limit of the number of irradiation times at which the sample to be analyzed is not damaged from
relationship between the number of measurements and at least one of the total scattering intensity for each number of irradiation times and the ratio of the total scattering intensity in the specific wavenumber range for each time irradiation to the total scattering intensity in the specific wavenumber range for the first time irradiation, and
relationship between the number of measurements and the correlation coefficient; and
using Raman scattering light data up to the upper limit of the number of irradiation times.
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