US 12,480,869 B2
Multi-wavelength ozone concentration sensor and method of use
Heinrich Johannes Seiwert, Berlin (DE); Felix Groitl, Berlin (DE); Christiane Le Tiec, Berlin (DE); and Ulrich Alfred Brammer, Berlin (DE)
Assigned to MKS Inc., Andover, MA (US)
Filed by MKS Inc., Andover, MA (US)
Filed on Sep. 27, 2021, as Appl. No. 17/486,139.
Prior Publication US 2023/0098744 A1, Mar. 30, 2023
Int. Cl. G01N 21/33 (2006.01); G01N 33/18 (2006.01)
CPC G01N 21/33 (2013.01) [G01N 33/1893 (2013.01); Y10T 436/206664 (2015.01)] 44 Claims
OG exemplary drawing
 
1. An apparatus for measuring a concentration of ozone within a fluid, comprising:
a conduit defining at least one passage therein, the conduit having at least one coating selectively applied thereto and defining one or more transmission regions on the conduit;
a multi-wavelength light source system having:
at least one light source configured to direct at least one initial optical signal having at least a first wavelength range through an ozonated fluid within the conduit; and
at least one UV light source configured to direct at least one UV optical signal having a second wavelength range through the ozonated fluid;
wherein the at least one light source and the at least one UV light source are arranged such that the at least one initial optical signal and the at least one UV optical signal traverse through the conduit along different optical paths via respective reflections from the at least one coating of the conduit;
wherein an optical path of the at least one UV optical signal traversing through the conduit is shorter than an optical path of the at least one initial optical signal traversing through the conduit due to the at least one UV optical signal reflecting off of the at least one coating of the conduit fewer times than the at least one initial optical signal during the traversal through the conduit;
at least one detector positioned proximate to the at least one transmission region formed on the conduit, the at least one detector configured to detect the at least one initial optical signal and the at least one UV signal for measuring the concentration of ozone within the ozonated fluid.