US 12,480,848 B2
Crack sensor, preparation method therefor, and application thereof in micro-force measurement
Li Wang, Jinan (CN); Xingyuan Xu, Jinan (CN); Jun Chen, Jinan (CN); Weiguang Su, Jinan (CN); Anqing Li, Jinan (CN); Zhaoqiang Chen, Jinan (CN); and Chonghai Xu, Jinan (CN)
Assigned to QILU UNIVERSITY OF TECHNOLOGY (SHANDONG ACADEMY OF SCIENCES), Jinan (CN)
Filed by QILU UNIVERSITY OF TECHNOLOGY (SHANDONG ACADEMY OF SCIENCES), Jinan (CN)
Filed on Jan. 15, 2025, as Appl. No. 19/021,368.
Application 19/021,368 is a continuation of application No. PCT/CN2022/137584, filed on Dec. 8, 2022.
Claims priority of application No. 202210833004.2 (CN), filed on Jul. 15, 2022.
Prior Publication US 2025/0155341 A1, May 15, 2025
Int. Cl. G01N 3/02 (2006.01); G01N 3/08 (2006.01); G01N 3/62 (2006.01); G01N 33/483 (2006.01)
CPC G01N 3/02 (2013.01) [G01N 3/08 (2013.01); G01N 3/62 (2013.01); G01N 33/4833 (2013.01); G01N 2203/0005 (2013.01); G01N 2203/0019 (2013.01); G01N 2203/0062 (2013.01); G01N 2203/0282 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A method for preparing a crack sensor, comprising: coating a photoresist layer on a surface of a substrate; etching a plurality of microchannels on a surface of the photoresist layer; coating a layer of polydimethylsiloxane (PDMS) on the same surface, and curing to obtain a PDMS layer, wherein the PDMS layer has a first face with a plurality of linear protrusions and a second face that is smooth; covering the second face of the PDMS layer with a template having linear through-holes; successively forming a silver layer, a chromium layer, and a CNT-PDMS layer on a side of the template; removing the template to obtain a structure; and pre-stretching the structure to obtain the crack sensor; wherein the crack sensor comprises a flexible film, wherein a first side of the flexible film is provided with a plurality of linear protrusions, and an opposite second side of the flexible film is configured with a linear structure; the linear structure comprises, in order from bottom to top, a silver layer, a chromium layer, and a carbon nanotubes (CNT)-PDMS layer, wherein the CNT-PDMS layer is composed of PDMS doped with CNT; the silver layer is configured with a crack structure, the crack structure being a crack that changes in response to the deformation of the silver layer; wherein the flexible film is a PDMS film; the CNT-PDMS layer has a thickness of 5-20 μm; and the CNT-PDMS layer contains carbon nanotubes in an amount of 0.01-5 wt %.