US 12,480,839 B2
Köhler illumination system for inspection of radiused end connectors
Abhilash Sukumari, Nepean (CA); Kevin Cassady, Monroe, WA (US); Christopher Russell Wagner, Kanata (CA); Nicklos Joseph Bulitka, Stittsville (CA); Eugene Chan, Ottawa (CA); and Christian Richard Comtois-Arnaldo, Ottawa (CA)
Assigned to VIAVI SOLUTIONS INC., Chandler, AZ (US)
Filed by VIAVI SOLUTIONS INC., Chandler, AZ (US)
Filed on Jan. 3, 2024, as Appl. No. 18/403,040.
Prior Publication US 2025/0216290 A1, Jul. 3, 2025
Int. Cl. G02B 21/36 (2006.01); G01M 11/00 (2006.01); G02B 21/06 (2006.01)
CPC G01M 11/30 (2013.01) [G02B 21/06 (2013.01); G02B 21/365 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A microscopy system, comprising:
a light source to provide illumination;
a diffuser to receive and diffuse the illumination from the light source, and to project the diffused illumination;
a beamsplitter to receive and reflect the diffused illumination;
an objective to receive and project the reflected diffused illumination upon a device under test (DUT); and
an imager to image the DUT by receiving reflected light from the DUT via the objective;
wherein either the diffuser or an image of the diffuser is disposed at the back focal plane of the objective to provide Köhler illumination to the DUT where a numerical aperture of illumination (NAIL) is greater than a numerical aperture of imaging (NAIM).