US 12,480,761 B2
High temperature auto teach calibration disc
Dylan Arius Harootunian, Burlingame, CA (US); and Damon K. Cox, Jarrell, TX (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Nov. 28, 2023, as Appl. No. 18/521,271.
Prior Publication US 2025/0172391 A1, May 29, 2025
Int. Cl. G01B 21/04 (2006.01)
CPC G01B 21/042 (2013.01) 19 Claims
OG exemplary drawing
 
1. A method comprising:
inserting a calibration disc into a processing chamber using a robot arm;
determining a first position of a center of the calibration disc using one or more sensors positioned at a port of the processing chamber as the calibration disc is inserted into the processing chamber;
placing the calibration disc onto a substrate support within the processing chamber, wherein one or more features of the calibration disc cause the calibration disc to become centered on the substrate support;
removing the calibration disc from the substrate support and from the processing chamber using the robot arm;
determining a second position of the center of the calibration disc using the one or more sensors as the calibration disc is removed from the processing chamber;
determining a difference between the first position of the center of the calibration disc and the second position of the center of the calibration disc; and
determining an offset to apply to the robot arm when placing wafers onto the substrate support based on the determined difference.