US 12,480,595 B2
Anti freeze valve apparatus and semiconductor processing device including the same and manufacturing method thereof
Jin Se Park, Chungcheongnam-do (KR); Ki Bong Kim, Gyeonggi-do (KR); and Myung Seok Cha, Seoul (KR)
Assigned to SEMES CO., LTD., Chungcheongnam-do (KR)
Filed by SEMES CO., LTD., Chungcheongnam-do (KR)
Filed on Oct. 25, 2022, as Appl. No. 17/973,495.
Claims priority of application No. 10-2021-0150676 (KR), filed on Nov. 4, 2021.
Prior Publication US 2023/0136985 A1, May 4, 2023
Int. Cl. F16K 31/122 (2006.01)
CPC F16K 31/1221 (2013.01) 7 Claims
OG exemplary drawing
 
1. A valve apparatus, comprising:
a spring;
an adjusting member that transmits force to the spring to cause the spring to contract or relax;
a safety valve body configured to contract or relax with the spring;
a valve piston pressurized by a movement of the safety valve body to also contract or relax with the spring;
a piston ring configured to surround the valve piston;
a valve housing configured to surround the adjusting member, the spring, the safety valve body, the valve piston, and the piston ring;
an airtight member configured to form a sealed space that blocks penetration of external materials by surrounding the valve housing;
a heat insulating material configured to surround the airtight member;
a first gas supplier that supplies gas into the valve apparatus; and
second gas supplier that receives the gas from the first gas supplier,
wherein the valve housing is spaced apart from the airtight member and separated by the sealed space, and
wherein a portion of the valve housing making up the first gas supplier and the second gas supplier is not surrounded by the airtight member such that sealed space is not formed around the first gas supplier and the second gas supplier.