US 12,480,209 B2
Vaporization vessel and method
Bryan C. Hendrix, Danbury, CT (US); Scott L. Battle, Cedar Park, TX (US); David J. Eldridge, Liberty Hill, TX (US); John N. Gregg, Marble Falls, TX (US); Jacob Thomas, Leander, TX (US); Manuel F. Gonzales, Fort Worth, TX (US); Kenney R. Jordan, Denton, TX (US); and Benjamin H. Olson, Round Rock, TX (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Oct. 13, 2023, as Appl. No. 18/380,142.
Application 18/380,142 is a continuation of application No. 16/856,687, filed on Apr. 23, 2020, granted, now 11,821,087.
Claims priority of provisional application 62/839,181, filed on Apr. 26, 2019.
Prior Publication US 2024/0084452 A1, Mar. 14, 2024
Int. Cl. C23C 16/458 (2006.01); C23C 14/18 (2006.01); H01L 21/02 (2006.01)
CPC C23C 16/4583 (2013.01) [C23C 14/185 (2013.01); H01L 21/02271 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A method of assembling a tray of a vaporization vessel, comprising
forming the tray which comprises a side wall, a bottom plate, an interior space defined by the side wall and the bottom plate, and one or more apertures that extend through the bottom plate;
placing one or more pre-made arms in the tray; and
securing the one or more pre-made arms to the tray, with one or more removable fasteners such that the one or more pre-made arms are non-destructibly removable from the tray to allow for cleaning of the tray and the one or more pre-made arms to lower impurity formation during use of the vaporization vessel.