| CPC C23C 14/042 (2013.01) [C23C 16/042 (2013.01); H10K 71/166 (2023.02)] | 13 Claims |
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1. A deposition apparatus comprising:
a chamber;
a deposition source disposed in the chamber;
a mask assembly comprising:
a frame including frame openings;
a mask disposed on the frame, the mask including deposition holes; and
a welding stick disposed on the mask; and
a base substrate disposed on the mask assembly, wherein
the frame comprises:
a body part having a rectangular frame extending in a first direction and a second direction intersecting the first direction; and
the frame openings extending in a third direction perpendicular to a plane formed by the first and second directions,
a welding groove is defined in the body part of the frame extending along the first direction, the welding groove having a depth in the third direction of the frame,
the welding stick overlaps the welding groove with the mask disposed between the welding stick and the welding groove in the third direction, the welding stick extending in the first direction along the welding groove,
an upper surface of the welding stick and a portion, spaced apart from the upper surface of the welding stick, of an upper surface of the mask provide a flat surface on which the base substrate is disposed,
the upper surface of the welding stick and the portion of the upper surface of the mask both contact with the base substrate, and
the mask has a portion disposed in the welding groove.
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