US 12,150,384 B2
Ultrasound transducer with distributed cantilevers
Seow Yuen Yee, Mountain View, CA (US); Vladimir Petkov, San Jose, CA (US); Matthias Boecker, Reutlingen (DE); and Timo Schary, Aichtal (DE)
Assigned to Robert Bosch GmbH, (DE)
Filed by Robert Bosch GmbH, Stuttgart (DE)
Filed on Jul. 12, 2021, as Appl. No. 17/373,262.
Prior Publication US 2023/0011826 A1, Jan. 12, 2023
Int. Cl. H01L 41/113 (2006.01); B06B 1/06 (2006.01); G01B 17/02 (2006.01); G01S 7/521 (2006.01); G01S 15/931 (2020.01); H10N 30/30 (2023.01); H10N 30/50 (2023.01)
CPC H10N 30/306 (2023.02) [B06B 1/0607 (2013.01); G01B 17/02 (2013.01); G01S 7/521 (2013.01); G01S 15/931 (2013.01); H10N 30/302 (2023.02); H10N 30/50 (2023.02); G01S 2015/932 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An ultrasound transducer, comprising:
a membrane including a top portion and a bottom portion, wherein the membrane is configured to vibrate and generate an ultrasound in response to voltage applied at the transducer, wherein the membrane includes a perimeter including a plurality of sides, and a top surface and a bottom surface with one or more feet extending away from the bottom surface; and
a support member that attaches to and connects to the membrane and supports the membrane, wherein the support member includes one or more platforms extending to and attaching to the membrane and a substrate, wherein a first end of the platform connects to the membrane and includes a support portion, wherein the support portion extends away from the platform, wherein the platform includes the one or more piezoelectric layers.