US 12,150,233 B2
Target substance replenishment device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method
Yutaka Shiraishi, Oyama (JP); and Hideki Shishiba, Oyama (JP)
Assigned to Gigaphoton Inc., Tochigi (JP)
Filed by Gigaphoton Inc., Tochigi (JP)
Filed on Jun. 2, 2022, as Appl. No. 17/831,255.
Claims priority of application No. 2021-114988 (JP), filed on Jul. 12, 2021.
Prior Publication US 2023/0008733 A1, Jan. 12, 2023
Int. Cl. H05G 2/00 (2006.01); G03F 7/00 (2006.01); H01L 21/027 (2006.01)
CPC H05G 2/008 (2013.01) [G03F 7/70033 (2013.01); H01L 21/027 (2013.01); H05G 2/006 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A target substance replenishment device for use in an extreme ultraviolet light generation apparatus which outputs extreme ultraviolet light by irradiating a target substance with pulse laser light to turn the target substance into plasma, the target substance replenishment device comprising:
a first container configured to contain a solid target substance;
a first path through which the solid target substance supplied from the first container passes;
a first supply switching device capable of switching between a first state in which supply of the solid target substance from the first container to the first path is suppressed and a second state in which the supply of the solid target substance from the first container to the first path is allowed;
a first valve connected to the first path;
a second path which is connected to the first valve and through which the solid target substance having passed through the first valve passes;
a first detector configured to output a first detection signal indicating that the second path is clogged with the solid target substance; and
a processor configured to control the first supply switching device to the first state based on the first detection signal.