| CPC H02K 41/031 (2013.01) [H01L 21/68 (2013.01); H02N 15/00 (2013.01); H02K 2201/18 (2013.01)] | 10 Claims |

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1. A magnetic levitation planar motor workbench having a double-layer winding of coarse and fine drive, wherein the workbench comprises a stator (4) and a mover (8), wherein
the stator (4) comprises a base (3), and a plurality of vertically magnetized permanent magnets (1) and a plurality of horizontally magnetized permanent magnets (2) arranged in a groove of the base (3) in a Halbach arrangement;
the mover (8) is located on an enhanced side of a magnetic field generated by the stator (4); the mover (8) comprises a first winding (6) and a second winding (7) stacked under the first winding (6), and a height of the first winding (6) is less than a height of the second winding (7); both the first winding (6) and the second winding (7) comprise a plurality of coils generating driving forces in two directions after being energized, so that the first winding (6) and the second winding (7) each have a six-degree-of-freedom driving force and a driving torque; a contour shape of the mover (8) is in a square shape or a semi-square shape.
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