US 12,149,143 B2
Magnetic levitation planar motor workbench having double-layer winding of coarse and fine drive
Lizhan Zeng, Hubei (CN); Kai Liu, Hubei (CN); and Xuedong Chen, Hubei (CN)
Assigned to HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY, Hubei (CN)
Filed by HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY, Hubei (CN)
Filed on May 31, 2024, as Appl. No. 18/679,469.
Application 18/679,469 is a continuation of application No. PCT/CN2022/123698, filed on Oct. 4, 2022.
Claims priority of application No. 202210563843.7 (CN), filed on May 23, 2022.
Prior Publication US 2024/0322663 A1, Sep. 26, 2024
Int. Cl. H02K 41/03 (2006.01); H01L 21/68 (2006.01); H02N 15/00 (2006.01)
CPC H02K 41/031 (2013.01) [H01L 21/68 (2013.01); H02N 15/00 (2013.01); H02K 2201/18 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A magnetic levitation planar motor workbench having a double-layer winding of coarse and fine drive, wherein the workbench comprises a stator (4) and a mover (8), wherein
the stator (4) comprises a base (3), and a plurality of vertically magnetized permanent magnets (1) and a plurality of horizontally magnetized permanent magnets (2) arranged in a groove of the base (3) in a Halbach arrangement;
the mover (8) is located on an enhanced side of a magnetic field generated by the stator (4); the mover (8) comprises a first winding (6) and a second winding (7) stacked under the first winding (6), and a height of the first winding (6) is less than a height of the second winding (7); both the first winding (6) and the second winding (7) comprise a plurality of coils generating driving forces in two directions after being energized, so that the first winding (6) and the second winding (7) each have a six-degree-of-freedom driving force and a driving torque; a contour shape of the mover (8) is in a square shape or a semi-square shape.