US 12,148,857 B2
Method of manufacturing micro-LED display
Joonyong Park, Suwon-si (KR); Seogwoo Hong, Yongin-si (KR); Kyungwook Hwang, Seoul (KR); Hyunjoon Kim, Seoul (KR); and Junsik Hwang, Hwaseong-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Sep. 17, 2021, as Appl. No. 17/477,875.
Claims priority of provisional application 63/125,646, filed on Dec. 15, 2020.
Claims priority of application No. 10-2021-0040541 (KR), filed on Mar. 29, 2021.
Prior Publication US 2022/0190192 A1, Jun. 16, 2022
Int. Cl. H01L 27/15 (2006.01); H01L 33/00 (2010.01); H01L 33/62 (2010.01)
CPC H01L 33/005 (2013.01) [H01L 27/156 (2013.01); H01L 33/62 (2013.01); H01L 2933/0066 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method of manufacturing a display, the method comprising:
a first operation of transferring a plurality of micro light emitting diodes (LEDs) to a plurality of wells of an interposer through a fluidic self assembly (FSA) process;
a second operation of aligning a driving substrate on the interposer;
a third operation of injecting a penetrating solvent between the interposer and the driving substrate, such that the penetrating solvent penetrates between the plurality of micro LEDs and the plurality of wells; and
a fourth operation of transferring the plurality of micro LEDs to the driving substrate by radiating light to the interposer to vaporize the penetrating solvent.