US 12,148,778 B2
Micro lens arrays and methods of formation thereof
Yu-Tsung Lin, Hsinchu (TW)
Assigned to STMICROELECTRONICS LTD., Kowloon (HK)
Filed by STMICROELECTRONICS LTD., Kowloon (HK)
Filed on Apr. 28, 2021, as Appl. No. 17/243,195.
Prior Publication US 2022/0352232 A1, Nov. 3, 2022
Int. Cl. H01L 27/146 (2006.01); G02B 3/00 (2006.01); G03F 7/00 (2006.01)
CPC H01L 27/14627 (2013.01) [G02B 3/0018 (2013.01); G03F 7/0005 (2013.01); H01L 27/14621 (2013.01); H01L 27/14685 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of forming a device, the method comprising:
depositing a first photoresist layer over a substrate;
forming an array of seed lenses by patterning and reflowing the first photoresist layer, a dimension of the array of seed lenses varying across the substrate;
forming a second photoresist layer over the array of seed lenses; and
forming a microlens array by patterning and reflowing the second photoresist layer, a sagittal height of a seed lens in the array of seed lenses progressively decreasing from a center of the microlens array to an edge of the microlens array.