US 12,148,768 B2
Array substrate and display panel
Guangcai Yuan, Beijing (CN); Xue Dong, Beijing (CN); Feng Guan, Beijing (CN); and Yupeng Gao, Beijing (CN)
Assigned to BOE Technology Group Co., Ltd., Beijing (CN)
Filed by BOE Technology Group Co., Ltd., Beijing (CN)
Filed on Jun. 12, 2023, as Appl. No. 18/208,529.
Application 18/208,529 is a continuation of application No. 17/047,912, granted, now 11,715,744, previously published as PCT/CN2020/081172, filed on Mar. 25, 2020.
Claims priority of application No. 201910392488.X (CN), filed on May 13, 2019.
Prior Publication US 2023/0352496 A1, Nov. 2, 2023
Int. Cl. H01L 27/12 (2006.01)
CPC H01L 27/127 (2013.01) [H01L 27/1233 (2013.01)] 12 Claims
OG exemplary drawing
 
1. An array substrate, comprising:
a base substrate;
a first thin film transistor on the base substrate;
wherein the first thin film transistor comprises: a first gate electrode, a first active layer, a first source electrode, and a first drain electrode;
wherein the first active layer comprises:
at least one guide structure extending in a first direction;
a silicon-based nanowire, disposed on a side of the guide structure facing away from the base substrate; and
an extending direction of the silicon-based nanowire is same as an extending direction of the guide structure;
wherein the first active layer comprises a plurality of guide structures;
each of the plurality of guide structures extends in a first direction;
a cross section of the plurality of guide structures perpendicular to the first direction comprises a concave-convex structure;
wherein the concave-convex structure comprises a concave portion and a convex portion; and the silicon-based nanowire is located at a position corresponding to the concave portion.