US 12,148,748 B2
On-chip electrostatic discharge sensor
Subramanian Iyer, Los Angeles, CA (US); Kannan K. Thankappan, Los Angeles, CA (US); and Boris Vaisband, Los Angeles, CA (US)
Assigned to The Regents of the University of California, Oakland, CA (US)
Filed by The Regents of the University of California, Oakland, CA (US)
Filed on May 27, 2021, as Appl. No. 17/332,931.
Claims priority of provisional application 63/030,702, filed on May 27, 2020.
Prior Publication US 2022/0392893 A1, Dec. 8, 2022
Int. Cl. H01L 27/08 (2006.01); G01R 31/00 (2006.01); H01L 27/01 (2006.01); H01L 49/02 (2006.01)
CPC H01L 27/0805 (2013.01) [G01R 31/002 (2013.01); H01L 27/01 (2013.01); H01L 28/40 (2013.01)] 7 Claims
OG exemplary drawing
 
1. An electrostatic discharge detection circuit of an integrated circuit, comprising:
a pair of conductive plates and a dielectric disposed between the pair of conductive plates,
a first plate of the pair of conductive plates includes a body portion and an elongated portion extending from the body portion towards a second plate of the pair of conductive plates, and the second plate of the pair of conductive plates includes a body portion and an elongated portion extending from the body portion towards the first plate of the pair of conductive plates,
wherein the elongated portion of the first plate and the second plate each comprise rectangular shaped metal lines.