| CPC H01L 23/562 (2013.01) [H01L 24/73 (2013.01); H01L 2224/73204 (2013.01)] | 16 Claims |

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1. An electronic device, comprising:
a substrate;
an integrated circuit die attached to a surface of the substrate;
a structure having a first surface and a plurality of openings formed in the first surface to form respective cavities formed therein, wherein the first surface of the structure faces the surface of the substrate, wherein the openings are formed in a pre-determined pattern, and wherein the cavities are enclosed within the structure except for the openings formed in the first surface; and
an adhesive disposed between the surface of the substrate and the first surface of the structure and within at least a portion of the cavities.
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