US 12,148,698 B2
Semiconductor device and semiconductor device manufacturing method
Chien Cheng Liu, Hsinchu (TW); and Yun Chih Chang, Hsinchu (TW)
Assigned to REALTEK SEMICONDUCTOR CORPORATION, Hsinchu (TW)
Filed by REALTEK SEMICONDUCTOR CORPORATION, Hsinchu (TW)
Filed on Dec. 31, 2020, as Appl. No. 17/138,917.
Claims priority of application No. 109100365 (TW), filed on Jan. 6, 2020.
Prior Publication US 2021/0210430 A1, Jul. 8, 2021
Int. Cl. H01L 23/528 (2006.01); G06F 30/392 (2020.01); G06F 30/398 (2020.01); G06F 119/06 (2020.01); G06F 119/12 (2020.01)
CPC H01L 23/5286 (2013.01) [G06F 30/392 (2020.01); G06F 30/398 (2020.01); G06F 2119/06 (2020.01); G06F 2119/12 (2020.01)] 12 Claims
OG exemplary drawing
 
1. A semiconductor device, powered by a power supply, wherein the semiconductor device comprises:
a circuit macro, configured to execute a specific function;
a first power mesh, including a plurality of metal lines extending along a first direction from a first side of the circuit macro to a second side of the circuit macro, wherein the first power mesh is coupled to the circuit macro; and
a plurality of first power switch circuits, wherein each of the plurality of first power switch circuits includes:
a control signal input terminal, configured to receive a control signal;
a control signal output terminal, configured to output the control signal;
a power input terminal, coupled to the power supply; and
a power output terminal, coupled to the first power mesh;
wherein the plurality of first power switch circuits selectively couple the power supply to the first power mesh according to the control signal, respectively, and the plurality of first power switch circuits are arranged in sequence, wherein the control signal output terminal of each of the first power switch circuits except for a last one of the first power switch circuits is coupled to the control signal input terminal of a next one of the first power switch circuits, so that the control signal passes through the plurality of first power switch circuits sequentially.