US 12,148,685 B2
Redistribution layer structure
Hung-Sheng Chou, Miao-Li County (TW); Wen-Hsiang Liao, Miao-Li County (TW); Kuo-Jung Fan, Miao-Li County (TW); Heng-Shen Yeh, Miao-Li County (TW); and Cheng-Chi Wang, Miao-Li County (TW)
Assigned to Innolux Corporation, Miaoli County (TW)
Filed by Innolux Corporation, Miao-Li County (TW)
Filed on Nov. 18, 2021, as Appl. No. 17/530,373.
Claims priority of application No. 202011476484.9 (CN), filed on Dec. 15, 2020; and application No. 202111337111.8 (CN), filed on Nov. 12, 2021.
Prior Publication US 2022/0189862 A1, Jun. 16, 2022
Int. Cl. H01L 23/498 (2006.01); H01L 21/48 (2006.01); H01L 21/683 (2006.01)
CPC H01L 23/49822 (2013.01) [H01L 21/4857 (2013.01); H01L 21/6835 (2013.01); H01L 2221/68345 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A redistribution layer structure, comprising:
a first metal layer;
a first dielectric layer, disposed on the first metal layer;
a second metal layer, disposed on the first dielectric layer;
a second dielectric layer, disposed on the second metal layer;
a third metal layer, disposed on the second dielectric layer;
a third dielectric layer, disposed on the third metal layer;
a fourth metal layer, disposed on the third dielectric layer; and
a fourth dielectric layer, disposed on the fourth metal layer,
wherein a range of a difference between a coefficient of thermal expansion of the first dielectric layer and a coefficient of thermal expansion of the first metal layer is 0% to 70% of the coefficient of thermal expansion of the first dielectric layer,
wherein a Young's modulus of the third dielectric layer is less than a Young's modulus of the first dielectric layer.