US 12,148,645 B2
Calibration jig and calibration method
Andrew Myles, Sunnyvale, CA (US); Denis Martin Koosau, Sunnyvale, CA (US); Peter Muraoka, Santa Clara, CA (US); and Phillip Criminale, Livermore, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Feb. 7, 2024, as Appl. No. 18/435,175.
Application 18/435,175 is a division of application No. 16/407,520, filed on May 9, 2019, granted, now 11,935,773.
Claims priority of provisional application 62/685,004, filed on Jun. 14, 2018.
Prior Publication US 2024/0178035 A1, May 30, 2024
Int. Cl. H01L 21/68 (2006.01); H01J 37/32 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/68 (2013.01) [H01J 37/32642 (2013.01); H01J 37/3288 (2013.01); H01J 37/32908 (2013.01); H01J 37/32935 (2013.01); H01J 37/3299 (2013.01); H01L 21/681 (2013.01); H01L 21/68721 (2013.01); H01L 21/68735 (2013.01); H01L 21/68742 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for levelling an edge ring relative to a reference surface, the method comprising:
positioning a calibration jig relative to the reference surface;
moving the edge ring relative to the reference surface using a plurality of ring lift pins each coupled to a dedicated drive motor positioned relative to the edge ring at three positions;
sensing movement of the edge ring using sensors coupled to the calibration jig, each sensor corresponding to a position of a respective ring lift pin;
calculating an offset that includes a difference in an amount of movement between each of the ring lift pins; and
storing a calibration value in a system controller.