US 12,148,641 B2
Container and substrate treating apparatus
Dukhyun Son, Cheonan-si (KR); and Byung Kyu Kim, Seoul (KR)
Assigned to SEMES CO., LTD., Chungcheongnam-do (KR)
Filed by SEMES CO., LTD., Chungcheongnam-do (KR)
Filed on Aug. 6, 2021, as Appl. No. 17/396,267.
Claims priority of application No. 10-2020-0098949 (KR), filed on Aug. 7, 2020.
Prior Publication US 2022/0044951 A1, Feb. 10, 2022
Int. Cl. H01L 21/673 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67383 (2013.01) [H01L 21/67736 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A container comprising:
a housing having an interior space; and
a support part configured to directly support an expendable component in the interior space,
wherein the support part includes:
an alignment pin configured to align the expendable component;
at least one support slot; and
an alignment block installed in the support slot to be detachable, and having the alignment pin;
wherein the alignment block has a protrusion formed on at least any one of surfaces contacting the support slot and guiding insertion of the alignment block at the at least any one of surfaces contacting the support slot, so that an upper surface and a lower surface of the alignment block with respect to an insertion direction are exposed.