US 12,148,623 B2
Deposition of tungsten on molybdenum templates
Patrick A. van Cleemput, San Jose, CA (US); Shruti Vivek Thombare, Sunnyvale, CA (US); and Michal Danek, Cupertino, CA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/294,378
Filed by Lam Research Corporation, Fremont, CA (US)
PCT Filed Nov. 18, 2019, PCT No. PCT/US2019/062067
§ 371(c)(1), (2) Date May 14, 2021,
PCT Pub. No. WO2020/106649, PCT Pub. Date May 28, 2020.
Claims priority of provisional application 62/769,479, filed on Nov. 19, 2018.
Prior Publication US 2022/0013365 A1, Jan. 13, 2022
Int. Cl. H01L 21/285 (2006.01); C23C 16/06 (2006.01); C23C 16/455 (2006.01); H01L 23/532 (2006.01); H10B 12/00 (2023.01); H10B 41/27 (2023.01); H10B 43/27 (2023.01)
CPC H01L 21/28568 (2013.01) [C23C 16/06 (2013.01); C23C 16/45525 (2013.01); H01L 23/53257 (2013.01); H10B 12/34 (2023.02); H10B 41/27 (2023.02); H10B 43/27 (2023.02)] 28 Claims
OG exemplary drawing
 
1. A method comprising:
depositing a molybdenum (Mo)-containing layer in a feature on a substrate; and
depositing tungsten (W) on the Mo-containing layer to thereby fill the feature with tungsten, wherein the average crystallite size of the tungsten is at least 20 nm.