US 12,148,610 B2
Spin on carbon composition and method of manufacturing a semiconductor device
Jing Hong Huang, Kaohsiung (TW); Ching-Yu Chang, Yuansun Village (TW); and Wei-Han Lai, New Taipei (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed on Jun. 29, 2023, as Appl. No. 18/216,468.
Application 18/216,468 is a continuation of application No. 17/864,293, filed on Jul. 13, 2022, granted, now 11,728,161.
Application 18/216,468 is a continuation of application No. 16/984,070, filed on Aug. 3, 2020, granted, now 11,476,108, issued on Oct. 18, 2022.
Prior Publication US 2023/0343582 A1, Oct. 26, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/02 (2006.01)
CPC H01L 21/02167 (2013.01) [H01L 21/02115 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A composition, comprising:
a carbon backbone polymer;
a first crosslinker; and
a second crosslinker,
wherein the first crosslinker partially crosslinks the carbon backbone polymer at a temperature ranging from 100° C. to 170° C., and the second crosslinker crosslinks the carbon backbone polymer at a temperature ranging from 180° C. to 300° C.,
wherein the first crosslinker is one or more selected from the group consisting of A-(OR)x, A-(NR)x,

OG Complex Work Unit Chemistry
where A is a monomer, oligomer, or a second polymer having a molecular weight ranging from 100 to 20,000,
R is an alkyl group, cycloalkyl group, cycloalkylepoxy group, or C3-C15 heterocyclic group,
OR is an alkyloxy group, cycloalkyloxy group, carbonate group, alkylcarbonate group, alkyl carboxylate group, tosylate group, or mesylate group,
NR is an alkylamide group or an alkylamino group, and
x ranges from 2 to 1000,
wherein the second crosslinker is different from the first crosslinker, and
wherein when either of the first crosslinker or the second crosslinker is a polymer, the polymer is a different polymer than the carbon backbone polymer.