US 12,148,599 B2
Plasma chamber for an optical emission spectroscopy instrument
André Peters, Kleve-Warbeyen (DE)
Assigned to HITACHI HIGH-TECH ANALYTICAL SCIENCE GMBH, Uedem (DE)
Filed by Hitachi High-Tech Analytical Science GmbH, Uedem (DE)
Filed on Oct. 24, 2023, as Appl. No. 18/493,243.
Claims priority of application No. 22203570 (EP), filed on Oct. 25, 2022.
Prior Publication US 2024/0136163 A1, Apr. 25, 2024
Prior Publication US 2024/0234110 A9, Jul. 11, 2024
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32807 (2013.01) [H01J 37/32055 (2013.01); H01J 37/32972 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A spark stand assembly for an optical emission spectroscopy (OES) instrument, the spark stand assembly comprising:
a spark stand body that at least partially defines a plasma chamber therein;
an exciter at least partially disposed inside the plasma chamber; and
an optical transmission path from the plasma chamber for providing a view to a plasma generated in the plasma chamber,
wherein the plasma chamber is provided with an opening for exposing a part of a sample positioned on the opening for excitation from the exciter so as to generate plasma on a surface of the sample upon activation of the exciter,
wherein a coating layer that comprises a tribological coating is arranged to cover at least a portion of surfaces of the plasma chamber; and
wherein said tribological coating comprises diamond-like carbon (DLC).