US 12,148,580 B2
MEMS device built on substrate with ruthenium based contact surface material
Andrew Minnick, Queensbury, NY (US); Christopher F. Keimel, Niskayuna, NY (US); and Xu Zhu, Belmont, MA (US)
Assigned to Menlo Microsystems, Inc., Irvine, CA (US)
Filed by Menlo Microsystems, Inc., Irvine, CA (US)
Filed on Oct. 14, 2022, as Appl. No. 18/046,774.
Application 18/046,774 is a division of application No. 16/832,408, filed on Mar. 27, 2020, granted, now 11,501,928.
Prior Publication US 2023/0064520 A1, Mar. 2, 2023
Int. Cl. H01H 1/0237 (2006.01); B81C 1/00 (2006.01); H01H 49/00 (2006.01); H01H 59/00 (2006.01); H01L 21/00 (2006.01); H01H 1/00 (2006.01)
CPC H01H 1/0237 (2013.01) [H01H 49/00 (2013.01); H01H 59/0009 (2013.01); H01L 21/00 (2013.01); B81C 1/0015 (2013.01); B81C 1/00166 (2013.01); B81C 1/00182 (2013.01); H01H 2001/0052 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A switching apparatus, comprising:
an ohmic micro-electro-mechanical system (MEMS) switch device constructed on a substrate, the ohmic MEMS switch device having one or more contacts consisting of a platinum-group metal;
an oxidized layer of the platinum-group metal formed on an outer surface of each of the one or more contacts, and formed in a first processing chamber;
a cap bonded to the substrate in a second processing chamber that is separate from the first processing chamber, to form a hermetically sealed cavity that encloses the ohmic MEMS switch device, a cavity atmosphere within the sealed cavity that is substantially the same as a bonding atmosphere and has a proportion of oxygen within a range of 0.05% to 30%.