US 12,148,140 B2
Process condition estimating apparatus, method, and program
Akio Ishikawa, Tokyo (JP); and Shuichi Tamamushi, Tokyo (JP)
Assigned to ALITECS CORPORATION, Saitama (JP)
Filed by ALITECS Corporation, Saitama (JP)
Filed on Apr. 26, 2022, as Appl. No. 17/729,044.
Application 17/729,044 is a continuation of application No. PCT/JP2020/040589, filed on Oct. 29, 2020.
Claims priority of application No. 2019-197402 (JP), filed on Oct. 30, 2019.
Prior Publication US 2022/0254009 A1, Aug. 11, 2022
Int. Cl. G06T 7/00 (2017.01)
CPC G06T 7/0004 (2013.01) [G06T 2207/20084 (2013.01); G06T 2207/30148 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A process condition estimating apparatus comprising a processor and memory for estimating a process condition in which an object is processed, the apparatus comprising:
an input unit configured to input measurement data, that has a number of dimensions greater than a number of types of process conditions, acquired at a predetermined position of the processed object; and
an estimation unit configured to estimate the process condition from the measurement data, by performing dimension reduction to same number of dimensions as the number of types of the process conditions, based on a process-condition-estimating function for inputting the measurement data and outputting an estimation value of the process condition.