US 12,148,139 B2
Methods and evaluation devices for analyzing three-dimensional data sets representing devices
Ramani Pichumani, Palo Alto, CA (US); Thomas Korb, Schwaebisch Gmuend (DE); Dmitry Klochkov, Schwaebisch Gmuend (DE); and Jens Timo Neumann, Aalen (DE)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Nov. 29, 2021, as Appl. No. 17/536,662.
Prior Publication US 2023/0169636 A1, Jun. 1, 2023
Int. Cl. G06T 7/00 (2017.01); G06N 20/20 (2019.01); G06T 7/11 (2017.01)
CPC G06T 7/0004 (2013.01) [G06N 20/20 (2019.01); G06T 7/11 (2017.01); G06T 2207/20081 (2013.01); G06T 2207/30148 (2013.01)] 20 Claims
OG exemplary drawing
 
13. An evaluation device for evaluating 3D data of a device under inspection, comprising one or more processors and a non-transitory machine-readable medium storing instructions that when executed by the one or more processors cause the one or more processors to:
detect target objects in the 3D data using a first machine learning logic,
apply a voxel classification to the detected target objects using a second machine learning logic to provide classified voxels that represent a segmentation of voxels depending on material of the device the respective voxel represents,
apply a transformation to feature space to the classified voxels, and
obtain measurement results based on the transformation to feature space.