US 12,147,212 B2
Diagnostic methods for substrate manufacturing chambers using physics-based models
Venkata Ravishankar Kasibhotla, Bengaluru (IN); Tao Zhang, San Ramon, CA (US); Xiaoqun Zou, Danville, CA (US); and Bala Shyamala Balaji, Bengaluru (IN)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 21, 2021, as Appl. No. 17/558,507.
Prior Publication US 2023/0195074 A1, Jun. 22, 2023
Int. Cl. G05B 19/404 (2006.01); G06N 20/00 (2019.01)
CPC G05B 19/404 (2013.01) [G06N 20/00 (2019.01); G05B 2219/37506 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method, comprising:
receiving first sensor data, generated during a manufacturing process by sensors associated with a substrate manufacturing chamber;
receiving simulated sensor data generated by a trained physics-based model;
determining that an actuator of the substrate manufacturing chamber contributes to a difference between the first sensor data and the simulated sensor data, by determining that a difference between first data indicative of chamber pressure and second data indicative of chamber pressure is less than a first threshold value; and
causing performance of a corrective action in view of the difference between the first sensor data and the simulated sensor data.