US 12,147,096 B2
Light modulator, optical device including light modulator, and electronic apparatus including optical device
Junghyun Park, Seoul (KR); Yeonsang Park, Seoul (KR); Sunil Kim, Osan-si (KR); Duhyun Lee, Yongin-si (KR); and Byunggil Jeong, Anyang-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Jun. 14, 2023, as Appl. No. 18/334,838.
Application 18/334,838 is a continuation of application No. 16/880,350, filed on May 21, 2020, granted, now 11,714,301.
Claims priority of application No. 10-2019-0164156 (KR), filed on Dec. 10, 2019.
Prior Publication US 2023/0324724 A1, Oct. 12, 2023
Int. Cl. G02F 1/03 (2006.01); G02B 26/10 (2006.01); G02F 1/01 (2006.01); G02F 1/09 (2006.01)
CPC G02F 1/0311 (2013.01) [G02B 26/10 (2013.01); G02F 1/0147 (2013.01); G02F 1/0316 (2013.01); G02F 1/09 (2013.01); G02F 2201/307 (2013.01); G02F 2201/346 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A light modulator comprising:
a substrate; and
a resonator configured to modulate a phase of incident light by modulating a refractive index based on an external stimulus, the resonator comprising a first reflective structure provided on the substrate, a cavity layer provided on the first reflective structure, and a second reflective structure provided on the cavity layer,
wherein at least one of the first reflective structure or the second reflective structure comprises first material layers and second material layers that are alternately stacked with the first material layers,
wherein each of the first material layers has a first refractive index and each of the second material layers has a second refractive index that is different than the first refractive index,
wherein at least one first material layer of the first material layers has a thickness t1′ that is different from a thickness t1 of other first material layers of the first material layers,
wherein the cavity layer, the first reflective structure, or the second reflective structure comprises an electro-optic material having a permittivity that changes based on an electrical signal applied thereto, and
wherein the light modulator further comprises a first electrode in contact with the first reflective structure, and a second electrode in contact with the second reflective structure.