US 12,147,075 B2
Back-end-of-line edge couplers with a tapered grating
Yusheng Bian, Ballston Lake, NY (US); and Rod Augur, Saratoga Springs, NY (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GlobalFoundries U.S. Inc., Malta, NY (US)
Filed on May 11, 2022, as Appl. No. 17/741,684.
Prior Publication US 2023/0367067 A1, Nov. 16, 2023
Int. Cl. G02B 6/30 (2006.01); G02B 6/12 (2006.01); G02B 6/122 (2006.01); G02B 6/124 (2006.01); G02B 6/13 (2006.01); G02B 6/34 (2006.01); G02B 6/42 (2006.01)
CPC G02B 6/1228 (2013.01) [G02B 6/305 (2013.01); G02B 6/4214 (2013.01); G02B 6/12002 (2013.01); G02B 2006/12107 (2013.01); G02B 2006/12147 (2013.01); G02B 6/124 (2013.01); G02B 6/13 (2013.01); G02B 6/34 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A structure comprising:
a silicon-on-insulator substrate including a semiconductor substrate and a dielectric layer on the semiconductor substrate;
a first waveguide core on the dielectric layer; and
a back-end-of-line edge coupler configured to couple light to the first waveguide core, the back-end-of-line edge coupler including a second waveguide core and a first grating positioned in a vertical direction between the semiconductor substrate and the second waveguide core, the second waveguide core including a first longitudinal axis, the first grating including a second longitudinal axis, a first section, a first plurality of segments positioned in the first section with a first spaced-apart arrangement along the second longitudinal axis, a second section, a second plurality of segments positioned in the second section with a second spaced-apart arrangement along the second longitudinal axis, and a third section configured to be positioned between the first section and a light source, the first plurality of segments having a first width that increases over a length of the first section with increasing distance from the third section, the second plurality of segments having a second width that decreases over a length of the second section with increasing distance from the first section, the second longitudinal axis aligned substantially parallel to the first longitudinal axis, and the first plurality of segments positioned along the second longitudinal axis between the third section and the second plurality of segments.