| CPC G02B 26/0875 (2013.01) [G01J 3/26 (2013.01); G02B 7/188 (2013.01); G02B 26/001 (2013.01); G02B 26/02 (2013.01)] | 21 Claims |

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1. An optoelectronic device, comprising:
a collar for holding an optical fiber outputting an optical signal;
a planar mirror disposed in an optical path of the optical signal;
electrodes;
a membrane that is movable relative to the planar mirror in accordance to a voltage applied to the electrodes;
a curved mirror, disposed on the membrane and translatable relative to the planar mirror with movement of the membrane, having a finite radius of curvature of at least 10 millimeters, the curved mirror comprising alternating layers of a compressive material characterized by a compressive stress and a tensile material characterized by a tensile stress that counteracts the compressive stress.
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