US 12,147,030 B2
Optical package having tunable filter
Jiang-Huai Zhou, Windham, NH (US); and Glenn D Bartolini, Waltham, MA (US)
Assigned to II-VI DELAWARE, INC., Wilmington, DE (US)
Filed by II-VI Delaware, Inc, Wilmington, DE (US)
Filed on May 11, 2021, as Appl. No. 17/317,059.
Prior Publication US 2022/0365339 A1, Nov. 17, 2022
Int. Cl. G02B 26/08 (2006.01); G01J 3/26 (2006.01); G02B 7/188 (2021.01); G02B 26/00 (2006.01); G02B 26/02 (2006.01)
CPC G02B 26/0875 (2013.01) [G01J 3/26 (2013.01); G02B 7/188 (2013.01); G02B 26/001 (2013.01); G02B 26/02 (2013.01)] 21 Claims
OG exemplary drawing
 
1. An optoelectronic device, comprising:
a collar for holding an optical fiber outputting an optical signal;
a planar mirror disposed in an optical path of the optical signal;
electrodes;
a membrane that is movable relative to the planar mirror in accordance to a voltage applied to the electrodes;
a curved mirror, disposed on the membrane and translatable relative to the planar mirror with movement of the membrane, having a finite radius of curvature of at least 10 millimeters, the curved mirror comprising alternating layers of a compressive material characterized by a compressive stress and a tensile material characterized by a tensile stress that counteracts the compressive stress.