| CPC G02B 19/0014 (2013.01) [B23K 26/0643 (2013.01); B23K 26/0648 (2013.01); B23K 26/0665 (2013.01); G02B 19/0047 (2013.01)] | 18 Claims |
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1. A laser device comprising:
a light source configured to generate a laser beam;
a stage to hold a substrate; and
a lens assembly disposed between the light source and the stage and irradiating the laser beam to the substrate disposed on the stage, the lens assembly comprising:
a first lens assembly making divergent the laser beam provided from the light source;
a deflector changing a path of the laser beam provided from the first lens assembly, the deflector comprising a first mirror and a second mirror; and
a second lens assembly condensing the laser beam provided from the deflector and irradiating the condensed laser beam to the substrate,
wherein the second lens assembly comprises a second lens closest to the deflector, a third lens next to the second lens, a fourth lens next to the third lens, and a fifth lens farthest from the deflector,
wherein a diameter of the second lens is smaller than a diameter of the fifth lens,
wherein the first mirror of the deflector is disposed adjacent to the first lens assembly and the second mirror of the deflector is disposed adjacent to the second lens assembly, and the first mirror rotates in a first axis and the second mirror rotates in a second axis which is perpendicular to the first axis,
wherein the first lens assembly comprises a first lens including a first light incident surface and a first light exit surface, the first light incident surface having a concave shape and the first light exit surface having a convex shape, and
wherein an absolute value of a radius of curvature of the first light exit surface is equal to or greater than a radius of curvature of the first light incident surface.
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