US 12,146,926 B2
Multi-functional magnetic test structure for XMR sensors
Christoph Schroers, Villach (AT); Manfred Steiner, Rennweg am Katschberg (AT); and Armin Winkler, Villach (AT)
Assigned to Infineon Technologies AG, Neubiberg (DE)
Filed by Infineon Technologies AG, Neubiberg (DE)
Filed on Aug. 7, 2023, as Appl. No. 18/366,170.
Application 18/366,170 is a continuation of application No. 16/590,985, filed on Oct. 2, 2019, granted, now 11,719,770.
Prior Publication US 2024/0019508 A1, Jan. 18, 2024
Int. Cl. G01R 33/09 (2006.01); G01R 33/00 (2006.01); G01R 33/028 (2006.01); G01R 33/07 (2006.01)
CPC G01R 33/091 (2013.01) [G01R 33/0283 (2013.01); G01R 33/07 (2013.01); G01R 33/0017 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method, comprising:
providing a current to a conductive element of a test structure to cause a magnetic field to be applied to a set of test sensing elements of the test structure and to a set of sensing elements,
wherein the test structure and the set of sensing elements are on a sensor die;
measuring a first magnetic sensitivity of the set of test sensing elements; and
verifying that the first magnetic sensitivity of the set of test sensing elements represents a second magnetic sensitivity of the set of sensing elements based at least in part on determining that a first resistance of the set of test sensing elements and a second resistance of the set of sensing elements are within a tolerance value.