US 12,146,897 B2
Vertical probe card having different probes
Wei-Jhih Su, Taichung (TW); Chao-Hui Tseng, New Taipei (TW); Hao-Yen Cheng, Taoyuan (TW); and Mei-Hui Chen, Taoyuan (TW)
Assigned to CHUNGHWA PRECISION TEST TECH. CO., LTD., Taoyuan (TW)
Filed by CHUNGHWA PRECISION TEST TECH. CO., LTD., Taoyuan (TW)
Filed on Nov. 3, 2022, as Appl. No. 17/980,534.
Claims priority of application No. 111112373 (TW), filed on Mar. 31, 2022.
Prior Publication US 2023/0314477 A1, Oct. 5, 2023
Int. Cl. G01R 1/02 (2006.01); G01R 1/04 (2006.01); G01R 1/067 (2006.01); G01R 1/073 (2006.01); G01R 3/00 (2006.01); G01R 31/20 (2006.01); G01R 31/28 (2006.01)
CPC G01R 1/07314 (2013.01) [G01R 1/04 (2013.01); G01R 1/07364 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A vertical probe card having different probes, comprising:
a first guiding board unit and a second guiding board unit that is spaced apart from the first guiding board unit; and
a plurality of fence-like probes passing through the first guiding board unit and the second guiding board unit, wherein each of the fence-like probes has a probe length within a range from 5 mm to 8 mm, and each of the fence-like probes includes:
a fence-like segment having an elongated shape defining a longitudinal direction, wherein the fence-like segment includes a penetrating slot formed along the longitudinal direction and having a length greater than 65% of the probe length, and wherein the fence-like segment includes two arms that are respectively arranged at two opposite sides of the penetrating slot and that are spaced apart from each other by an adjustment distance within a range from 10 μm to 120 μm; and
a connection segment and a testing segment that are respectively connected to two end portions of the fence-like segment and that respectively pass through the first guiding board unit and the second guiding board unit;
wherein the fence-like probes have a same contact force and include a first probe and a second probe, and wherein the first probe and the second probe are configured to respectively meet different electrical transmission requirements, a minimum cross-sectional area of the fence-like segment of the first probe is equal to a minimum cross-sectional area of the fence-like segment of the second probe, and a shape of the penetrating slot of the first probe is different from a shape of the penetrating slot of the second probe;
wherein, in the first probe, the fence-like segment has a first protrusion extending from one of two long walls of the penetrating slot by a first predetermined width and spaced apart from another one of the two long walls of the penetrating slot by a first gap;
wherein, in the first probe, the fence-like segment includes a second protrusion that extends from one of the two long walls of the penetrating slot by a second predetermined width and that is spaced apart from another one of the two long walls of the penetrating slot by a second gap.